Cassette Loading Ultraviolet Curing System
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Description
• Applicable for all UV films with 365nm wavelength
• Can process up to 300mm (12") wafers
• Near room temperature process
• Uniform UV (ultraviolet) radiation over the entire sample stage
• Automated wafer handling and cassette loading mechanism
• Allows complete curing of film surface by means of Nitrogen (N2) purge
• Simple operation with a safety interlocks
• No UV light source replacement required for more than 10 years
• Peak wavelength: 365nm
• Electrical: 100 VAC
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Cassette Loading Ultraviolet Curing System
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